振动轮式微机械陀螺动态特性的光学测试

Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope

建立了基于高速摄像技术、显微技术与数字图像处理技术的光学测试系统。配有光学显微镜的高速摄像设备(32000 frame/s)记录并保存被测物瞬时序列图像,根据被测物的角振动特性设计相应的图像处理方法以获得振子各时刻的运动位移,并通过位移时间曲线分析振子的固有频率、阻尼系数及品质因子等动态特性参数。实验结果显示,频率测量误差<0.01%。高精度地测量了振动轮式微机械陀螺的动态特性,为微结构动态特性的研究提供了一个有效方法。

To evaluate the dynamic characteristics of vibrating wheel micromechanical gyroscope, an optical test system based on high speed camera system combined with microscope and digital image processing technique was set up. A sequence of real time images of the tested object were recorded by high speed camera （32 000 frame/s） equipped with a microscope. Then, based on the angular vibrating characteristics of the tested object, the corresponding image processing method was applied to figure out the displacement of vibrator at any time. Through the analysis of displacement-time curve, the dynamic characteristics of vibrator such as nature frequency, damp coefficient and quality factor could be obtained. The experimental results show that the measurement error is less than 0. 01%, which indicates the test system has high precision in dynamic characteristic measurement of vibrating wheel micromechanical gyroscope, and it is an available method to study dynamic characteristics of microstructure as well.