摘要
成功地利用超声喷雾热解法在玻璃衬底上制备了TiO2薄膜。Ti(SO4)2作为钛源,甲醇作为溶剂。利用超声波的雾化作用将反应物形成细小的雾滴,并喷射到预热的玻璃衬底上分解而形成稳定的TiO2薄膜。为获得致密均匀的薄膜,优化了反应物浓度、温度、沉积时间等参数。利用X射线衍射与原子力显微镜表征了薄膜的晶体结构与表面形貌。X射线结果表明薄膜为多晶锐钛矿结构TiO2薄膜,并在(101)方向呈现出择优趋势。
TiO2 films were successfully deposited on glass substrates using ultrasonic spray pyrolysis method. Ti （SO4）2 was used as reactant. Methanol was used as solvent. Tiny fog droplets including reactant produced by ultrasonic nebulizer unit were sprayed on pre-heated glass substrates. Then, pyrolysis of reactant will happen and thin films will be deposited on the glass. Several deposition condition such as concentration, temperature and deposition time were optimized for obtaining compact and uniform thin films. The crystal structure and surface morphology were characterized by XRD and AFM. The results show that the crystal structures of films are polycrystalline TiO2 anatase phase. The preferred orientation is （101）.
出处
《电子器件》
CAS
2008年第1期236-238,共3页
Chinese Journal of Electron Devices
基金
This work was supported the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry；by Foundations of Pujiang Talented Person Plans (No. 05PJ14037) and Nanotechnology (No. 0552nm042) of Shanghai Municipal Science ＆ Technology Committee；Shanghai-Applied Materials Research and Development fund (No. 0519).
