摘要
随着昆虫飞行机理和仿生扑翼飞行研究的不断进展,理解昆虫的传感系统并研制适于微型扑翼飞行器的仿生传感器逐渐成为目前关注的焦点,而MEMS的快速发展使得研制新型的仿生微型传感器成为可能。简要介绍仿生扑翼飞行中传感系统研究现状,对昆虫飞行中采用的力传感器原理、分类进行了介绍;重点分析了几种典型的力传感器;归纳和总结了基于昆虫毛状传感器、钟状传感器和平衡棒仿生,采用各种MEMS技术研制的微型力传感器的生产工艺和应用特点;探索和展望了仿生力传感器的发展特点和今后的发展趋势。
With the development of insect flying mechanism and biomimetic flight, understanding and reproducing of insect sensors has focused. Recent development of microfabrication technologies for MEMS maks it possible to design and fabricate a new miniaturized sensors based on the sensory systems of real insects. The principle and classification of sensors in flying insects are introduced, and some key sensors are analyzed. The characteristics and application of biomimetic force sensors with MEMS are summered. The main properties and the direction of biologically inspired force sensors are discussed.
出处
《传感器与微系统》
CSCD
北大核心
2008年第2期14-18,共5页
Transducer and Microsystem Technologies
基金
211工程振兴行动计划资助项目(3008002102)
国防科工委预研计划资助项目
