一种新型解耦硅微机械陀螺的设计

Design of Novel Decoupled Silicon Micromachined Gyroscope

提出了一种新型静电驱动微机械陀螺结构,采用两组对称的梳齿结构作为驱动电极,同时采用中央质量块栅格和与驱动电极相同的梳齿两种结构检测感应模态的振动,每种结构设计两组独立的检测电极,分别采用差分方式进行检测,有效提高了陀螺的灵敏度。该陀螺结构的驱动模态和感应模态振动相互解耦,振动特性相似,固有频率、阻尼系数和品质因数等参数接近。采用有限元法分析了该结构的参数和特性,介绍了结构的制作流程。该结构谐振频率高、阻尼系数小,可达到较高的测量分辨率和准确率。

The design and fabrication of a novel micromachined static driven gyroscope with decoupled structure was presented. Two groups of comb structures were employed as drive electrodes. Comb structure and bar structure electrodes were both used to detect the tiny amplitude of the sense mode. Two impendent electrodes were designed for each structure, and the differential method was applied for detection. The result shows that the sensitivity of the gyroscope is improved. Vibrations of the drive mode and the sense mode are decoupled, and the vibration characteristics are the same. Natural frequencies, damping factors and quality factors of these two modes are very close. Characteristics and parameters were analyzed with finite element method （FEM）. The process of the structrue was introduced. Due to the high resonance frequency and the low damping factor, the accuracy and resolution of this gyroscope is high.