MMI微压印模板的设计与研究

Design and Research of Imprinting Stamp for MMI Waveguide Device

微纳米压印技术作为代替传统光刻的一种新兴技术,有着重要的应用潜力。近年来在直接加工微器件如微流体、微生物器件,特别是在微平面光学器件方面得到了较快的发展。采用微压印法直接加工聚合物微平面光学器件是一个具有实用价值和研究价值的课题。该文首先讨论并选取了聚甲基丙稀酸甲酯(PMMA),研究了聚合物多模干涉(MMI)耦合器器件的微压印模板的设计和加工,讨论了压印模板材料的影响。根据典型基于MMI聚合物分光器件模板的设计实例,由聚合物的光学性能和分光要求,设计出模板的几何尺寸,通过微细加工工艺加工出模板,并给出了初步的热压印实验结果。

Micro and nano imprinting, an emerging technology developed for replacing the traditional photo lithography, has great potential application. In recent years, it has been applied to fabricate microcomponent sucn as the micro fluidic device, micro biology device, especially micro optical system. Replication and transformation of a stamp to the device is a core idea of imprinting lithography technology. The stamp was required to be reliable, sta- bile, and repeatable in the real application. Fabrication of PMMA polymer MMI device by direct micro imprinting technology is investigated in this paper. The imprinting stamp of a typical MMI device was designed according to requirements of the MMI and fabricated by micromachining technology. Then the stamp was used to fabricate the PMMA pattern by hot embossing. Finally micromachining processes influenced on the quality of stamp were analyzed and more discussion was given.