HP40钢表面Al_2O_3薄膜制备及抑制结焦性能研究

Investigation of Alumina Films Deposited on HP40 Alloy by MOCVD and the Property of Coke Formation Inhibition

以仲丁醇铝(ATSB)为前驱物、氮气为载气,用金属有机化学气相沉积法(MOCVD)在HP40钢表面沉积了Al2O3薄膜。采用光学金相显微镜(OM)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、原子力显微镜(AFM)等仪器设备,研究了Al2O3薄膜组织结构及其抑制结焦的能力。实验结果表明,当沉积温度为350℃,以ATSB为前驱物在HP40钢表面制备了纳米晶Al2O3薄膜,该薄膜具有表面平整、均匀、致密的特点,且具有明显抑制结焦作用,结焦抑制率达到52.4%以上。

Thin alumina films were deposited on the heat-resistant steel, type HP40. The deposition process was carried out in nitrogen by atmospheric pressure metal-organic chemical vapor deposition （MOCVD） with aluminum-tri-sec-butoxide （ATSB） as the precursor. The microstructure and coke formation inhibition property of the alumina films were investigated using optical microscopy （OM）, scanning electron microscopy （SEM）, X-ray diffraction （XRD） and atomic force microscopy （AFM）. The results showed that alumina films deposited at 350℃ were nano crystalline, whose surface was smooth, uniform, and dense, and the efficiency of the coke formation inhibition achieved above 52.4%.