工作气氛和偏压对含铁聚合物杂混薄膜制备的影响

The Effect of Working Gas and Bias on Preparation of Fe containing Polymer Composite Films

采用等离子体增强金属有机化合物化学气相沉积（ＰＥＭＯＣＶＤ）工艺，在氧化性气氛（Ｏ２）和非氧化性气氛（Ｈ２、Ａｒ）中制备了含铁聚合物杂混薄膜。探讨了工作气氛和偏压对膜密度、沉积速率及其分布的影响。

Different working gases(H 2, Ar and O 2) are used for preparation of Fe containing polymer composite films by plasma enhanced metal organic chemistry vapour deposition(PEMOCVD). The effect of working gas and bias on density, deposition rate and its distribution of films were discussed.