摘要
自主设计研制的非球面数控抛光机采用气囊式抛光工具,可抛光100mm以下的非球面光学零件,针对口径35mm凹非球面透镜(顶点曲率半径R=-108.14mm的双曲面),研究了非球面的抛光工艺,并确定了相关工艺参数,抛光时间大约为20min,第二次次抛光后元件面形精度达到1.08μm,满足了该零件的使用要求。相对于现有设备美国Precitich公司的Microfinish 300型CNC非球面抛光机,该抛光设备实现了中等精度要求的小口径非球面元件的高效数控抛光。目前该抛光机已经成功地应用于某光学系统非球面零件的批量生产中。
An aspheric computer controlled polishing machine with gasbag tool which could polish aspheric surface under 100mm diameter is introduced.After polishing on 35 mm concave aspheric lens（hyperboloid lens）,the parameters of polishing used in polishing process are researched.It＇s showed that the final surface figure of the lens is 1.08μm（PV） after about 20min polishing time.The result of polishing reaches the request of this lens.Compared with the existing equipment Microfinish 300 high precision cnc polishing machine,this polishing machine is efficient,which could polishing medium precision aspheric lens.Now this equipment is succeeded in mass production of optical aspheric lens.
出处
《光学技术》
CAS
CSCD
北大核心
2008年第1期33-35,40,共4页
Optical Technique
关键词
非球面
气囊式抛光头
去除函数
aspheric surface
gasbag polishing tool
removal function
