碳化硅指向反射镜轴的高精度镶接技术研究

Research on precision fixing mirror shafts to the silicon carbide mirror substrate

碳化硅具有优异的热学性能和机械性能,是高性能空间光学应用中的优选材料。但由于它的硬度很高,使得碳化硅反射镜的高精度加工和装配变得很困难。为了提高碳化硅反射镜与两个镜轴固接后的位置精度,采用了结合衬套修正的偏心轴补偿镶接方案。结果表明,这种方法可以将镶接完成后的两个镜轴的同轴度误差降低到0.005mm。由于在镶接过程中仅需要通用的加工设备和工装夹具,因此可以在保证良好经济性的前提下提高碳化硅反射镜的装配精度。

The excellent thermal and mechanical properties of silicon carbide make it an attractive candidate for space optical applications that require superior performance,but its high hardness has put some challenges in precision machining and assembling of silicon carbide mirror.The adjustment method,which combines eccentric shaft and error correct bush,is employed to fixing the two mirror shafts to the mirror substrate in order to improve location precision.Using this approach,eccentric distance between two mirror shafts completed fixing has reduced to 0.005mm.This technology just needs general machine tool and assembling jigs.Thereby,the method allows enhancing assembly precision of silicon carbide mirror at very cost effective condition.