基于三维有限元法的MEMS毫米波滤波器设计

An MEMS Millimeter-wave Filter Design Based on 3-D Finite Element Method

基于三维有限元法设计毫米波微机电系统(MEMS)带通滤波器,可借助于CAD软件使整个滤波器设计流程更加方便快捷,结果与传统微尺寸结构的FDTD分析法基本一致。同时给出了一种简便的毫米波带通滤波器的MEMS加工方案,并针对该加工方案进行了关键参数的工艺误差仿真,为毫米波MEMS滤波器设计提供了一些有意义的理论及工艺分析,对于利用MEMS工艺制造的毫米波微尺寸无源器件设计也具有很大的参考价值。

A novel design method was presented for millimeter-wave micro-electro-mechanical-systems （MEMS） filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter＇s design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.