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微米纳米科学技术发展及产业化启示 被引量：3

Inspiration on Development and Industrialization of Micro/Nano Science and Technology
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摘要 近年来,微米纳米科学技术发展迅速,在产业化方面已经取得了不少进展.本文从发展现状和趋势上,结合我国具体情况,阐述了以下观点:开展创新工艺和设计方法研究,提高微机电(MEMS)应用和产业化能力;开展基础研究,提高MEMS器件和系统的水平;加强微米/纳米科学技术成果的结合.最后对今后研究工作提出了建议. With development of mico/nano science and technology, great progresses are made in industrialization as well. Some viewpoints were presented in this paper according to Chinese current status and trend in development： motivate studies on innovative fabrication and design to enhance our capability on application and industrialization of micro-electro-mechanical system （MEMS） ; motivate fundamental research for improving the level of component and system of MEMS; motivate the integration of micro/nano science and technology. Finally, some advice were given for the future works.
作者 丁衡高 朱荣
机构地区 清华大学精密仪器与机械学系
出处 《纳米技术与精密工程》 EI CAS CSCD 2007年第4期235-241,共7页 Nanotechnology and Precision Engineering
关键词 微机电系统 纳米科技 发展现状与趋势 micro-electro-mechanical system nano science and technology status and trend in development
分类号 TB383.1 [一般工业技术—材料科学与工程]
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参考文献12

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同被引文献32

  • 1朱荻,王明环,明平美,张朝阳.微细电化学加工技术[J].纳米技术与精密工程,2005,3(2):151-155. 被引量：42
  • 2刘定兴,胡先权,周天润.尖端导体表面附近的电场特性[J].重庆师范大学学报（自然科学版）,2007,24(1):56-58. 被引量：3
  • 3王大镇,冯培锋,赵清亮,刘华明.航天铝基复合材料零部件超精密加工技术研究[J].宇航学报,2006,27(6):1341-1346. 被引量：19
  • 4Chan K C,Cheung C F.A theoretical and experimental investigation of surface generation in diamond turning of an Al6061/SiCp metal matrix composite[J].International Journal of Mechanical Sciences,2001,43(9):2047-2068.
  • 5Kilichap E,Cakir O,Aksoy M,et al.Study of wear and surface roughness in machining of homogenised SiC-p reinforced aluminium metal matrix composite[J].Journal of Material Processing Technology,2005,164/165:862-867.
  • 6Kremer A,Devillez A,Dominiak S,et al.Machinability of Al/SiC particulate metal-matrix composites under dry conditions with CVD diamond-coated carbide tools[J].Machining Science and Technology,2008,12(2):214-233.
  • 7Andrewes C J E,Feng H Y,Lau W M.Machining of an aluminum/SiC composite using diamond inserts[J].Journal of Materials Processing Technology,2000,102(1):25-29.
  • 8El-Gallab M,Sklad M.Machining of Al/SiC particulate metal matrix composites (Part III):Comprehensive tool wear models[J].Journal of Materials Processing Technology,2000,101(1):10-20.
  • 9El-Gallab M,Sklad M.Machining of aluminum/silicon carbide particulate metal matrix composites (Part IV):Residual stresses in the machined workpiece[J].Journal of Materials Processing Technology,2004,152(1):23-34.
  • 10Zhang G F,Zhang B,Deng Z H.Mechanisms of Al/SiC composite machining with diamond whiskers[J].Key Engineering Materials,2009,404:165-175.

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纳米技术与精密工程
2007年 第4期

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