基于LIGA工艺的横向变形MEMS定位机构设计

Design of MEMS Latch Mechanism of Lateral Orientation Deformation Based on LIGA Technology

对两种横向变形的终止位置定位机构进行了力学分析,选择对被定位件滑块卡入阻力小的终止位置定位机构结构形式.根据少装配原则与满足MEMS整体系统性能要求相平衡的设计思想,将MEMS定位机构和基座分开设计.选择金属镍作为定位机构材料,用LIGA工艺成功制备出定位机构的原理样机和镍标准样条.在24℃和25%相对湿度的条件下,利用微型硬度测试仪对标准样条5个不同部位的点进行测量,测得材料镍的弹性模量为219GPa.列出了滑块运动的微分方程并进行求解,求解结果表明,滑块能够可靠运动到位并被定位机构可靠卡住.离心实验表明定位机构可靠地卡住了滑块,验证了理论分析和方案设计的可行性.

Two terminational latch mechanisms of lateral orientation deformation were mechanically analyzed and the one that had small resistance to the latch slider was chosen. To reach the MEMS requirement with the few assembling principle, the MEMS latch mechanism and pedestal were designed separately. The metal nickel was chosen as the material of latch mechanism, and the principle sample of latch mechanism and nickel standard sample were fabricated by LIGA technology. At 24 ℃ and relative humidity 25 %, five different points in LIGA Ni sample were tested with the micro hardness tester, and the Young＇s modulus of nickel was 219 GPa. The motion differential equation of slider was listed and worked out. The solution result shows that the slider can move to the destination and be latched reliably. The centrifugal experiment shows that the slider is latched reliably by latch mechanism, which validates the feasibility of theoretical analysis and scheme design.