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铝纳米梁的电学特性测试 被引量:1

Electrical Characteristics Testing of Aluminum Nano-Beams
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摘要 对铝纳米梁进行了力学和电学特性测试.力学测试结果表明,铝纳米梁处于弹性形变区,具有张应力.电学测试结果表明,纳米梁电阻随着扫描次数增加而增加.通过分析电学实验结果可知,扫描次数增加使纳米梁发生塑性形变,并使纳米梁上张应力减小.研究结果表明,纳米梁电阻随着纳米梁张应力增大而减小. The mechanical and electrical characteristics of Al(aluminum) nano-beams were presented in this paper. The mechanical test result shows that Al nano-beams have elastic tensile stress; while the electrical test result shows that the electric resistance arises with the increase of scan times. By analyzing electrical test restilts, it shows that the increase of scan times lead to plastic deformation and the descending of tensile stress of Al nano-beam. In conclusion, the electric resistance of nano-beam descends when its tensile stress arises.
出处 《纳米技术与精密工程》 EI CAS CSCD 2008年第1期5-8,共4页 Nanotechnology and Precision Engineering
基金 国家重大基础研究发展(973)项目(0000000512)
关键词 纳米梁 电学特性 弹性形变 扫描次数 nano-beam electrical characteristic elastic deformation scan times
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参考文献7

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同被引文献12

  • 1朱年勇,于虹,黄庆安.纳机械谐振器的非线性特性分析[J].电子器件,2005,28(1):35-37. 被引量:3
  • 2宋震煜,于虹.纳米梁非线性振动的动力学分析[J].微纳电子技术,2006,43(3):145-149. 被引量:6
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  • 10徐临燕,栗大超,胡小唐,黄玉波.基于原子力显微镜的纳米梁杨氏模量的测量[J].天津大学学报,2007,40(7):816-820. 被引量:9

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