摘要
提出了将时间相移显微干涉测量方法用于微结构和器件的几何特性检测上.该方法速度快、无损、非接触、易在晶片级进行,具有亚微米级的水平分辨力,垂直分辨力在纳米量级.测量系统采用Mirau显微干涉物镜,利用高性能压电陶瓷物镜纳米定位器实现垂直方向的相移,并通过健壮的5帧Hariharan算法获取表面的相位信息.通过测量美国国家标准研究院(NIST)认证的标准台阶对系统进行了精度标定,并通过测量微谐振器和压力传感器微薄膜的几何尺寸说明了该方法作为测量和过程表征工具的功能.
Temporal phase-shifting microscopic interferometry was used for geometrical characterization and device inspection in this paper. This method is quick, non-destructive, non-contact, and easy to carry out at the wafer scale with sub-micrometer lateral resolution and nanometer vertical resolution. The measurement system was based on a Mirau microscopic interferometer, using a piezo objective nano-positioner to realize phase shifting. It employed robust five-frame Hariharan algorithm to extract phase information from the surface. The measurement accuracy of the system was calibrated by a step height standard which is certificated by NIST. A micro pressure sensor and a micro resonator were employed to illustrate the capabilities of this system as a measurement and process characterization tool.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2008年第1期44-49,共6页
Nanotechnology and Precision Engineering
基金
国家高技术研究发展计划(863)项目(2006AA04Z327)
教育部高校博士点基金资助项目(20060056003)
高等学校学科创新引智计划资助项目(B07014)
关键词
纳米计量
微机电系统
相移干涉术
Hariharan算法
台阶标准
nano-metrology
micro-electro-mechanical systems （MEMS）
phase-shifting interferometry
Hariharan algorithm
step height standard
