白光反射谱测薄膜厚度实验

Measurement of Thickness of the Thin Film Using Reflectance Spectrum of the White Light

本实验利用白光的反射谱来测薄膜的厚度,利用单色仪测量不同波长光的干涉光强度,把对条纹的测量转变为对不同波长干涉光强度的测量,既可以手动也可以利用数据采集系统自动采集和处理数据,使操作和测量更加简洁方便。

Thickness of the thin film was measured through using reflectance spectrum of the white light and interference light intensity of different wavelength was measured by monochrometer. The measurement of interference light intensity of different wavelength was transformed from the measurement of the stripes. So it is very convenient to operate and test by hand or by automatic data acquisition system.