一种超高速触发器工艺技术的研究

A Novel Process Technology for Very High SpeedECL D-Type Flip-Flops

在等平面Ｓ工艺基础上，开发了一种ＥＣＬ超高速Ｄ触发器的ＩＣ工艺制作技术，并优化其关键工艺，得出一套新的工艺控制方案和参数。用该工艺技术制作的晶体管截止频率ｆＴ最大值为５．４ＣＨｚ（Ｖｃｅ＝５Ｖ）：制作的ＥＣＬ超高速Ｄ触发器，在功耗电流只有３０ｍＡ情况下，工作频率典型值为８５０ＭＨｚ，最高可达９００ＭＨｚ以上，较好地解决了器件速度与功耗的矛盾。

A novel Ic Process Technology for very high-speed ECL D-type flip-flops has been in- vestigated based on the isoplanar S process. The critical process of the technology is optimized and a novel scheme for process control and a. set of pararneter. have been derived. Transistors fabricat- ed with this technology has a maximum Of 5. 4 GHz for =5 V The ECL high speed D-type flip-flop developed with the process has a typical operating frequency of 850 MH. (max> 900 MHz) at a power dissipation of 30 mA.