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飞秒激光加工及其应用 被引量:4

Femtosecond Laser and Its Application in Micromachining
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摘要 综述了激光短脉冲化的飞秒激光发展史,重点论述了飞秒激光的加工机理和特点。飞秒激光独特的光束特性决定了他是一种理想的微细加工工具,可以实现聚合物的制备,可以对各种透明材料内部进行三维加工和改性,另外在生物学领域也有着独特的应用。本文最后还展望了飞秒激光加工未来的发展方向。 It is reviewed that the shortening development of laser pulse and the application of femtosecond laser precise fabrication in this article. The mechanisms and characteristics of femtosecond laser in micromachining are mainly described. Its unique traits of femtosecond laser beam primely illuminate that it is a perfect tool in microfabrication, which can fabricate polymer, and enables fabrication of three-dimensional microstructures in various transparent materials, except a unique application in the biology field. Finally, the prospects of femtosecond laser fabrication are also discussed.
出处 《新技术新工艺》 2008年第2期48-51,共4页 New Technology & New Process
关键词 短脉冲化 飞秒激光 微细加工 laser pulse shortening,femtosecond laser pulses,micromachining
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