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薄膜声表面波器件的制备研究进展 被引量：2

Research progress in thin film surface acoustic wave devices
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摘要 介绍了薄膜声表面波器件的发展历史和特点,以及压电薄膜声表面波器件近年来国际上的研究进展,包括理论研究与实验进展的一些概况,并展望了其今后的发展趋势。 The feature and history of the piezoelectric thin film surface acoustic wave （SAW） devices are described. And theoretic and practical developments of piezoelectric thin film SAW devices in the world are reviewed. The progress in future on SAW devices are also reviewed.
作者 王锐 杨成韬 张树人 李健雄
机构地区 电子科技大学电子薄膜与集成器件国家重点实验室
出处 《电子元件与材料》 CAS CSCD 北大核心 2008年第2期8-9,共2页 Electronic Components And Materials
关键词 电子技术 声表面波器件 综述 压电薄膜 叉指换能器 electron technology SAW devices review piezoelectric film interdigital-transducer
分类号 TN65 [电子电信—电路与系统]
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参考文献11

  • 1Zhang V, Lefebvre J, Gryba T. Saw Characteristics in a Layered ZnO/GaAs Structure for Design of Integrated SAW Filters [J]. IEEE Ultrason Symp, 2001, (1): 261-264.
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  • 3Wu T T, Chen Y Y. Exact analysis of dispersive SAW devices on ZnO/diamond/Si-layered structures [J]. IEEE Trans UFFC, 2002, 49(1): 142-149.
  • 4Shikata S, Hachigo A, Nakahata H, et al. Simulation of characteristics of a LiNbO3/diamond surface acoustic wave [J]. IEEE Trans Ultrason Ferroelcct Freq Contr, 2004, 51(10): 1309-1313.
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同被引文献8

  • 1MORTET V, WILLIAMS O A, HAENEN K. Diamond: a material for acoustic devices[J]. Phys Status Solidi, 2008, 205(5): 1009-1020.
  • 2UEMURA T, FUJII S, KITABAYASHI H. Low-loss surface acousstic wave devices using small-grain poly-crystalline diamond[J]. Jpn J Appl Phys, 2002, 41 : 3476.
  • 3SEO S H, LEE T H, KIM Y D, et al. Electron-emission from nano-and micro-crystalline diamond films: the effects of nitrogen and oxygen additives [J]. Thin Solid Films, 2004(6): 212-216.
  • 4ANSARI S G, ANH T L, SEO H K, et al. Growth kinetics of diamond film with bias enhanced nucleation and H2/CH4/Ar mixture in a hot-filament chemical vapor deposition system [J]. J Cryst Growth, 2004, 265 (3/4): 563-570.
  • 5VITOR B, HELDER J, PETERLEVITZ C, et al. Effects of the addition of helium on the synthesis of diamond films [J]. Thin Solid Films, 2000, 377/378: 182-187.
  • 6BACHMANN P K, HAGEMANN H J, LADE H, et al. Thermal properties of C--H, C--H--O, C--H--N and C--H--X grown polyerystalline CVD diamond [J]. Diamond Relat Mater, 1995, 4(5/6): 820-826.
  • 7雷亚民,王亨瑞,秦松岩,董长顺,何敬晖,陈磊,玄真武.金刚石膜的声学特性及其应用[J].硅酸盐通报,2010,29(3):644-650. 被引量：4
  • 8彭文博,贺永宁,赵小龙,刘晗,康雪,文常保.声表面波ZnO薄膜紫外探测器的响应机制研究[J].压电与声光,2014,36(1):12-15. 被引量：7

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电子元件与材料
2008年 第2期

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