摘要
制备了SiO2-B2O3-ZnO-Bi2O3系玻璃，并且与AIN液相烧结得到低温共烧玻璃陶瓷。分析了样品的相结构、形貌、介电常数、介质损耗、热导率和热膨胀系数等性能。结果表明：AIN与SiO2-B2O3-ZnO-Bi2O3系玻璃在950℃能够很好地烧结。该陶瓷的性能取决于烧结体的致密度和玻璃含量，当w（玻璃）为40％-60％时，陶瓷具有较低的εr（3.5-4.8）和tan δ[（0.13-0-48）×10^-2]、较高的λ[5.1-9.3W／（m·K）]以及与Si相接近的α1[（2.6-2.8）×10^-6·K^-1]，适用于低温共烧基板材料。
The LTCC SiO2-B203-ZnO-Bi2O3 glass-ceramics were produced by liquid phase sintering with AIN powder and were characterized by X-ray diffraction, scanning electron microscopy, etc. The results indicate that AIN and SiO2-B2O3-ZnO-Bi2O3 glass can be sintered well at 950℃. The performances of glass ceramics are determined by glass content and compactness. When the glass content is varied from 40% to 60% （mass fraction） the ceramics has εr（ 3.5-4.8 ） ,high λ[5.1-9.3W/（m·K）] and α1[（2.6-2.8）×10^-6·K^-1] matches with silicon.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2008年第1期58-61,共4页
Electronic Components And Materials
