摘要
采用射频磁控溅射法制备纳米TiO2薄膜,并应用显微拉曼光谱和电子显微镜对薄膜进行微区光分析.通过拉曼光谱研究,一方面有力地揭示出TiO2薄膜的晶体结构,另一方面对薄膜的生长方式提供了线索.薄膜聚集点和平常点上有统一的相结构,电子显微镜观察结果显示薄膜致密均匀.
Nanometre TiO2 film made by RF magnetron sputtering has been carried out micro-zone optical analysis by use of micro-Raman spectroscopy and electronic microscope. The study of Raman spectroscopy has demonstrated the crystal structure of TiO2 film and provided clues for film＇s growth. Film＇s focusing point and common point have unified phase structure and the film under electronic microscope in dense and uniform.
出处
《郧阳师范高等专科学校学报》
2007年第6期38-40,共3页
Journal of Yunyang Teachers College
基金
广东省自然科学基金项目(项目编号:No.04010480)
广东科技攻关项目(项目编号:2003Z3-D2011)
关键词
TIO2薄膜
磁控溅射
拉曼光谱
晶体结构
生长方式
TiO2 film
magnetron sputtering
Raman spectroscopy
crystal structure
growth pattern
