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微磨料空气射流加工特性研究 被引量:9

Study on the Machining Performance of Micro Abrasive Jet Machining
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摘要 通过微磨料空气射流加工普通平板玻璃的试验研究,分析了加工时间、空气压力、磨料流量、喷射距离、喷射角度、磨料种类、喷嘴结构和尺寸等加工工艺参数与微磨料空气射流加工的材料冲蚀率及玻璃表面冲蚀加工凹坑尺寸(凹坑直径和凹坑深度)之间的关系,得出了这些工艺参数对微磨料空气射流加工效果的影响规律。结果表明:喷射距离对材料冲蚀率和冲蚀凹坑的尺寸影响最大,存在一个可以获得最大冲蚀率和加工深度的最佳喷射距离;喷嘴的形状、尺寸和喷射角度的不同直接改变加工凹坑的轮廓,是影响微磨料空气射流加工轮廓结构形状的关键因素。 There are several parameters that have been claimed to have a significant effects on the micro abrasive jet machining(MAJM) process: air pressure, mass flow rate, nozzle distance to target material, machining time, impacting angle, nozzle shape and size, abrasive, etc. Based on the experimental study of MAJM for glass, the influences of these technical parameters on material erosion rate and the shape of the eroding dimple were investigated, and the basic technical laws of these effects on machining performance for MAJM were obtained. The results indicate that the nozzle distance to target material is the most prominent factor for material erosion rate and structure size of eroding dimple, there is an optimum distance to get maximum erosion rate and machining depth. The nozzle type and impacting angle are the key parameters for the dimple structure profile, directly changing the shape of machining dimples.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2008年第5期584-589,共6页 China Mechanical Engineering
基金 国家自然科学基金资助项目(50475045) 广东省科技计划国际合作项目(2003C50115)
关键词 微磨料 空气射流加工 材料冲蚀率 轮廓形状 micro abrasive air jet machining erosion rate structure profile
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参考文献15

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二级参考文献48

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共引文献14

同被引文献43

  • 1樊晶明,王成勇,王军.微磨料空气射流加工技术的发展[J].金刚石与磨料磨具工程,2005,25(1):25-30. 被引量:15
  • 2任露泉,张成春,田丽梅.仿生非光滑用于旋成体减阻的试验研究[J].吉林大学学报(工学版),2005,35(4):431-436. 被引量:21
  • 3Wang Chengyong, Wang Jun Fan Jingming. Development of Micro abrasive jet mchining technology [ C ]. Proceedings of the 6th international conference on frontiers of design and manufactuing. Jun. 2004, Xian :998 - 1000.
  • 4Pawlowski A G, Belloy E, Sayah A, et al. Powder Blasting Patterning Technology for Mierofabrication of Complex Suspended Structures in Glass[ J ]. Microelectronic Engineering ,2003,67 - 68:557 - 565.
  • 5Belloy E, Thurre S, Walckiers E, Sayah A, et al. The introduction of powder blasting for sensors and microsystem applications[J]. Sensors and Actuators A: Physical, 2000, 330 - 337.
  • 6Belloy E, Sayah A, Gijs M A M. Oblique Powder Blasting For Three - dimensional Micromachining of Brittle Materials [ J ]. Sensors and Actuators A : Physical, 2001,92 (1/3) : 58 - 363.
  • 7Slikkerveer P J, Bouten P C P, de Haas F C M. High Quality Mechanical Etching Of Brittle Materials by Powder Blasting[J].Sensors and Actuators A: Physical. 2000, 85(1/3): 296-303.
  • 8Wensink H, Elwenspoek M C. Reduction of Sidewall Inclination and Blast Lag of Powder Blasted Channels[J].Sensors and Actuators A: Physical. 2002,102 ( 1/2 ) : 157 - 164.
  • 9Ghobeity A, Getu H, Krajac T. Process Repeatability in Abrasive Jet Micro - machining[ J ]. Materials Processing Technology, 2007, 190 (1/3) : 51 -60.
  • 10Fan Jingming , Wang Chengyong , Wang Jun, et al. Effect of Nozzle Type and Abrasive on Machinablity in Micro Abrasive Jet Machining of Glass [J]. Key Engineering Materials, 2008, 359 - 360:404 - 408.

引证文献9

二级引证文献15

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