摘要
在半导体设备当中投影光刻机应是最为精密复杂的设备,其维修工作具有高度的技术性。论述了NSR1755i7A投影光刻机自动对准系统的工作原理,并分析了两例自动对准系统故障和排除故障的过程,最后提出对此类故障检查的一般原则。
The steppers are one of the most precise and complex semiconductor equipment, its rePairing work possesses very high technological level. The aiticle expounds the principle of NSRI755i7 stepper auto alignment system, analyses two troubles of auto alignment system and the process of solving these troubles, and proposes the method of checking these troubles.
出处
《电子工业专用设备》
2008年第2期1-3,共3页
Equipment for Electronic Products Manufacturing
关键词
分步重复
双频激光干涉
LSA
Step-and-repeat
Laser-interferometer
LSA（laser step alignment）
