容栅传感器误差的功率谱分析

The Power-Spectral Analysis of Error for Capacitive Gate Transducer

在实验测试和生产实践相结合的基础上，通过对容栅传感器综合精度误差的功率谱分析，找出误差规律中误差值较大点的位置，并在理论上对数显卡尺示值误差检定方法中标准检测点位置的选取进行阐述，在实践应用中取得了一定的效果。

This paper. analyzes the power-spectrum of capacitive gate transducer total error by practical tersing and production realiy. We find the position of error rairly marked point form the error regularity. Be- sides, we quantitative theoretical research for the position chose of standard testing of the testing method of display calipers display value error. This method has achieved some effect in practical application