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MEMS微梁疲劳频率特性测试与分析 被引量：6

Test and analyse on a frequency characteristic of a micro beam of MEMS
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摘要 多晶硅双端固支梁是MEMS器件中最常用的组件之一,它的疲劳特性直接关系到器件的寿命及安全性.本文针对多晶硅微梁结构进行疲劳可靠性测试,在对其施加循环静电激励后,测试了它的频率变化特性.并分析了频率向高频移动的原因,从而说明了梁的疲劳特性. Polysilicon beam is a basic part in MEMS, and its fatigue property influences the life and reliability of device directly . In this study, a fatigue test is done to the Polysilicon beam~ After the high - cycle electrostatic is actuated on the beam, the change of the resonance frequency is obsevered, and the reason is analysed, so the fatigue peoperty is better explained.
作者 兰之康 唐洁影
机构地区 东南大学MEMS教育部重点实验室
出处 《功能材料与器件学报》 CAS CSCD 北大核心 2008年第1期89-92,共4页 Journal of Functional Materials and Devices
基金 装备预先研究项目
关键词 MEMS 疲劳 梁 谐振频率 MEMS fatigue FF beam resonance frequancy
分类号 TN406 [电子电信—微电子学与固体电子学]
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参考文献8

  • 1Seyed M Allameh, Pranav Shrotriya, Alex Butterwick, et al. Surface Topography Evolution and Fatigue Fracture in Polysilicon MEMS Structures [J]. Journal of Microelectromechanical Systems, 2003, 12 ( 3 ) : 313 - 324.
  • 2C. L. Muhlstein, E. A. Stach, R. O. Ritchie. Mechanism of Fatigue in Micron - Scale Films of Polycrystalline Silicon for Microelectromechanical Systems [J]. Applied Physics Letters, 2002, 80(9) : 1532 - 1534.
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  • 5Muhlstein C L, Brown S B, Ritchie R O. High -cycle Fatigue and Durability of Polycrystalline Silicon Thin Films in Ambient Air [J]. Sensors and Actuators, 2001,177 - 188.
  • 6Hergen Kapels, Robert Aigner, Josef Binder. Fracture- Strength and Fatigue of Polysilicon Determined by a Novel Thermal Actuator [ J ]. IEEE TRANSACTIONS ON ELECTRON DEVICES,2000,47 : 1522 - 1529.
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  • 8吴昊,孟永钢,苏才钧,郭占社,温诗铸.多晶硅薄膜疲劳特性片外测试方法[J].哈尔滨工业大学学报,2006,38(4):592-594. 被引量：5

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二级引证文献14

功能材料与器件学报
2008年 第1期

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