摘要
微型扩散/收缩泵属于无阀型微机械往复微泵,其性能可以通过优化微型扩散/收缩管的结构参数得到优化。本文利用Fluent软件模拟得到最优的微型扩散/收缩管的结构参数,并提出微型固定鳞片式扩散/收缩管结构。基于硅基MEMS技术制备微型扩散/收缩泵,并通过Fluent软件模拟和实验验证了鳞片式扩散/收缩泵可以提高流阻效率11%。
Micro valveless nozzle/diffuser pump is a diaphragm pump, which utilize the different pressure drop characteristics of flow through a diffuser and a nozzle to direct the flow in one preferential direction, and hence cause a net pumping direction. In order to increase the flow rate of the nozzle/diffuser pump, fin - shaped micronozzle/diffuser pump was developed in this work. Fluent was used to simulate the characteristics of fin -shaped micro- diffuser/nozzle pump, and optimized parameters were given. Measurement results show that the new design can improve the micronozzle/diffuser pumping performance of 11%.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第1期205-209,共5页
Journal of Functional Materials and Devices
基金
63资助项目(No.2006AA04Z336)
关键词
微泵
扩散/收缩泵
扩散/收缩管
鳞片
mieropump
diffuser/nozzle pump
diffuser/nozzle element
fin
