新型三轴压阻式硅微加速度计的研究

Research on Novel Triaxial Piezoresistive Micro-Silicon Accelerometer

微惯性系统以及其他高精密场合往往需要高精度三轴加速度计来检测三个垂直方向加速度矢量。针对类似需求，介绍了一种四边八梁结构式三轴压阻式硅微加速度计，利用硅衬底上单一质量块和惠斯通半桥结构可同时实现三个轴向上的加速度高精度测量。另外设计了微加速度计在高过载环境下的硅一玻璃防护结构和体硅加工工艺，并通过ANSYS仿真和试验验证了加速度计结构的合理性，还对微加速度计相关性能进行了测试，测试结果表明，该微加速度计具有较高的测量精度和较好的线性度，满足设计要求。

Micro Inertial systems and other high-precision occasions often require high-precision triaxial accelerometer to measure the three directions acceleration vector. To solve this kind of problems, a four-sides and eight-beams, triaxial piezoresistive micro-silicon accelerometer is introduced, three axial accelerations can be measured at the same time with high- precision using a single mass on silicon underlay and Wheatstone haft-bridge structure. Furthermore the siliconglass protecting structure for these accelerometers in the situation of over-loading and bulk process is designed. Through the ANSYS simulation and test it is validates that the structure is reasonable, and the relevant performance of the Microaccelerometer is tested. The test results show that the micro-accelerometer has high precision and good linearity and satisfy design requirements.