退火温度对BaTiO_3薄膜的结构和介电性能的影响

Effect of Anneal Temperature on Structure and Dielectric Property of BaTiO_3 Thin Films

采用溶胶-凝胶法制备Si(100)基片上的BaTiO3陶瓷薄膜,并用红外光谱(IR)、x射线衍射(XRD)、扫描探针(SPM)等技术分析了钛酸钡凝胶的热解过程,以及不同退火温度下薄膜的晶粒、晶相、表面形貌、介电性能等指标。实验结果表明:高温有利于钛酸钡由立方相向四方相的转化;温度升高到1 023 K时,钛酸钡薄膜的表面形貌平整、均匀并具有良好的介电性能。

BaTiO3 thin films were prepared on Silicon（100） Substrate using sol-gel method. The pyrogenation of BaTiO3 gel and crystal grain, crystal character, surface appearance, dielectric property of the thin films at different anneal temperature were analyzed by IR, XRD and SPM technology. The result showed that high temperature was propitious to phase transaction of BaTiO3 form cube to square and when temperature rised to 1023 K, surface appearance of BaTiO3 thin films were smooth and even, and with well dielectric property.