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三维金属MEMS器件电化学制造技术

Electrochemical Fabrication Technology for 3D Metal MEMS Devices
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摘要 EFAB技术是微加工领域一项重大的突破,开辟了MEMS金属器件加工的新天地,与其他微加工技术相比,EFAB技术的主要优点是:可实现MEMS中复杂三维金属微结构器件快速、自动化、批量制造。基于快速原型思想,EFAB利用实时掩模技术将金属材料层层叠加起来,可以加工任意形状的金属三维微结构。介绍了EFAB技术原理,并对其加工设备、分层技术、实时掩模、过程监控等关键技术进行了剖析,最后给出了应用实例。 Electrochemical fabrication （EFAB） is a breakthrough in microfabrication technology. EFAB offers some advantages over competing technology such as prototyping, automation and volume production of metal microscale components for MEMS. By applying the principles of Solid Freeform Fabrication, EFAB employs instant mask to fabricate nearly arbitrary,truly 3D metal microstructures in a layer-by-layer manufacturing scheme.The technology principles of EFAB were described, including machining tool, slice technology, instant mask, process monitoring, et al. Compared with the other microfabrication technology, the superiority of EFAB and its applications were presented.
作者 王晓霞
机构地区 成都航空职业技术学院
出处 《微纳电子技术》 CAS 2008年第3期174-178,共5页 Micronanoelectronic Technology
关键词 电化学制造技术 微机电系统 实时掩模 三维微结构 分层技术 electrochemical fabrication （EFAB） MEMS instant mask 3D microscale components slice technology
分类号 TQ150.1 [化学工程—电化学工业]
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参考文献15

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微纳电子技术
2008年 第3期

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