混联机床轴线定位精度的干涉测量与误差补偿模型

Interferometry of position accuracy and error compensation model for coordinates of straight-line motion in hybrid NC machine tool

在对直线运动坐标定位精度的干涉测量原理和方法进行深入研究的基础上,对干涉测量的误差进行了分析。采用激光干涉法检测了混联机床X轴的定位精度和重复定位精度,并作出了基于测量数据的混联机床X轴单向均位偏差特性曲线,推导出了X轴正、反向运动定位误差的数学模型。利用最小二乘法拟合得到了机床直线运动坐标目标位置的均值误差补偿数学模型,提出了一种直线运动坐标定位精度的激光干涉测量方法和误差补偿模型的建模方法,并对X轴的定位精度进行了补偿。

Based on the deep studying on the principles and methods of laser interferometry for positioning accuracy of coordinates of straight-line motion, the error of interferometry is analyzed. The positioning accuracy and repeat positioning accuracy of X axis on hybrid NC machine tools is inspected and the characteristic curve of unilateral mean position deviation for X axis is plotted with measured data, the mathematical model of motion positioning error for X axis in positive shift and back-migration is derived. The average error compensation model of target location coordinates of straight-line motion on hybrid NC machine tool is obtained using least squares fitting. Then laser interferometry of positioning accuracy for coordinates of straight-line motion and modeling approach for error compensation are proposed and the positioning accuracy of X axis is compensated.