摘要
从半导体生产线上批加工设备的实际情况着手,考虑了工件动态时间到达和菜单间整定时间等问题,利用蚁群算法,实现了半导体生产线上单台批加工设备的优化调度。基于实际生产线模型仿真验证的结果表明,能够在合理的时间内取得满意解。
In view of requirements from real wafer labs, an ant colony optimization based scheduling algorithm for single batch processing machine is proposed. The dynamic arrival lots and set up time between two different recipes are considered.The simulation results show that the proposed algorithm can get better performance than common maximum batch size rules for the scheduling for single batch processing machine.
出处
《机电一体化》
2008年第3期32-35,共4页
Mechatronics
基金
国家自然科学基金(70531020)
关键词
单台批加工设备
蚁群算法
半导体生产线
single batch processing machine ant colony optimization (ACO) semiconductor fabrication lines