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激光调阻钌酸盐厚膜电阻浆料研究

A Study on Ruthenate Series for Thick Film Resistor Paste with Laser Trimming Stability
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摘要 介绍一种新的钌酸盐电阻改进体系,该体系中用Pb2Ru2O6代替钽钌酸铅(Pb2Ru2O6和Pb2Ta2O7)作导电相,用硼硅酸铅铝玻璃代替硼硅酸铅锌锆玻璃,完全不用BaTiO3,Pb-TiO3作为高阻TCR改性的掺杂剂。该体系制作的100kΩ/□以上电阻激光调阻稳定,电阻漂移小于±1%。 An improved ruthenate resistor paste is introduced in which Pb 2Ru 2O 6 is used as conductive composition instead of Pb 2Ru 2O 6+Pb 2Ta 2O 7 and B 2O 3-SiO 2-PbO-Al 2O 3 glass is used other than B 2O 3-SiO 2-PbO-ZnO-ZrO 2 glass, no BaTiO 3 and PbTiO 3 are added as additives to improve TCR of high resistivity. The resistor (>100kΩ/□)produced with this series paste is stable after laser trimming and the change in resistivity is less than ±1%.
出处 《贵金属》 CAS CSCD 北大核心 1997年第3期14-18,共5页 Precious Metals
关键词 钌酸盐电阻 激光调阻 稳定性 浆料 掺杂剂 Ruthenate resistor, Laser trim, Stability
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