离子束轰击对多层膜摩擦学性能的影响

THE INFLUENCE OF ION BEAM BOMBARDMENT TO THE TRIBOLOGICAL PERFORMANCE OF MULTILAYER FILM

用Ne离子束混合法制备了Ni／Cr多层膜，用Auger光电子能谱（AES）、X射线衍射（XRD）分析离子束混合多层膜的元素组成、分布和相结构，将其结果与简单蒸发沉积的Ni／Cr多层膜结构进行比较同时，对多层膜（轰击与未轰击）的硬度及摩擦学性能进行测定分析比较结果表明，离子束混合多层膜的硬度和抗磨性能与简单蒸发沉积多层膜相比都有提高这主要是因为Ne离子的轰击作用使多层膜更加致密及膜内的碳化铬硬质弥散相向界面处偏聚，使多层界面的强化作用得到加强。

Ni/Cr multilayer film was prepared by the way of Ne+ ion beam mixing. The distribution of elements and phase structure in Ni/Cr multilayer film were investigated using Auger electron spectroscopy sputtering depth profiles and X-ray diffraction analysis. The microhardness and tribological properties of multilayer film were measured. The results showed that Ni/Cr ion beam mixing multilayer film had high microhardness and anti-wear property compared with that of Ni/Cr multilayer film without ion beam bombardment. The high anti-wear property of ion beam mixing Ni/Cr multilayer film was attributed to the change of microstructure of the multilayer film and the dispersed chromium carbide microcrystals moved to the interfaces of multilayer film.