摘要
以一直径为Φ20 mm、平行度为10″的晶体锗窗口零件为例,介绍了晶体窗口零件加工中的关键技术。由于该零件直径小,平行差精度要求特别高,且为单晶锗材料,因此要高质高效地加工出符合技术指标的零件有相当的难度。在研究中摒弃了人们常说的晶体零件无法进行光胶的思想,大胆尝试"光胶"的方法,并结合工艺研究中经常出现的问题,有针对性地提出一套加工高精度晶体零件的控制措施。通过该措施的实施,能够很好地加工出高质高效的晶体窗口零件。实践证明:该方法适于批量加工;合格率高;能够满足设计的高精度需求。
A key technology used in the processing of crystal window elements is illustrated by a germanium window element,whose diameter is 20 mm and parallellism is 10″.Such a high-quality optical element is difficult to process because the element diameter is small,the parallellism requirement is high and the material is single crystal.Regardless of the conventional idea that crystal element can not be cemented,an'optical cement'method was used and a set of control measures for high-precision crystal elements processing was summarized.With the method and the control measures,the crystal window element with high quality was made.It was proved that the method can be used in mass production.
出处
《应用光学》
CAS
CSCD
2008年第2期289-292,共4页
Journal of Applied Optics
关键词
晶体
光胶
高精度
平行差
crystal
optical cement
high accuracy
parallel difference