ZrCl_4蒸汽法沉积ZrC涂层的锆源输送装置

A transportation equipment of zirconium source for ZrCl_4 vapor method depositing ZrC coatings

为解决ZrCl4蒸汽法化学气相沉积包覆燃料颗粒ZrC涂层时锆源输送的控制问题,设计制造了锆源输送装置。改装坩埚电阻炉,配备温度控制箱,以满足蒸发器的连接和控温要求;设计不锈钢蒸发器与耐高温、腐蚀压力表以满足腐蚀性气体测压要求;使用加热带和玻璃纤维布以满足ZrCl4蒸汽输送过程保温要求。最后进行ZrCl4蒸汽载带实验。实验结果表明,通过控制蒸发器加热温度和载气流量该装置可以实现ZrCl4蒸汽的定量载带,为ZrCl4蒸汽法沉积ZrC涂层提供了设备基础。

A system was designed and manufactured to transport the zirconium source in chemical vapor deposition of ZrC on fuel particles using ZrCl4 vapor method. A crucible resistance furnace was adapted to connect the vaporizer to the temperature-controlled target cabinet. The stainless steel vaporizer included a special pressure gauge to measure the pressure in the high temperature and corrosive environment. Heaters and fibre glass were used to maintain ZrC14 vapor temperature during transport. Tests show that the ZrCI4 vapor can be efficiently transported by controlling the ZrC14 vapor temperature and the carrier gas flow rate to give satisfactory deposition of the ZrC coatings.