流体二维振动加工技术的实验研究

Experimental Research on the Fluid Two-dimensional Vibration Machining Technology

提出了一种基于流体二维振动的超光滑表面加工新方法。该方法是对流体在水平和垂直方向同时施加超声振动,从而实现了流体的二维高频振动,为工件加工提供抛光作用力。研制了一套实验装置,该装置由工作槽、行星机构、控制装置等组成。利用该装置对光学玻璃进行了一系列实验,分析了抛光时间、抛光液的质量分数、磨料的粒度等对加工质量的影响。

A novel polishing technique based on the two-dimensional vibration of fluid was put forward. It provided ultrasonic vibration from both horizontal and vertical directions for the liquid at same time and supplied two-dimensional high-frequency vibration as the polishing power for the workpiece. A set of experimental equipment had been developed. This equipment was composed of the liquid slot, the planet device, the adjustment device and so on. The influences of particle size, concentration of polishing liquid, polishing time, and vibration parameters to polishing quality were discussed by series of processing experiments to the optical glass.