摘要
阐述超精密研磨技术的研磨机理和加工特点,讨论当前国内外研究和开发的几种超精密研磨技术及其发展。最后,介绍精密加工技术的检测设备、仪器。
The lapping mechanics and working characteristics of ultra-precision lapping are presented, then methods and developments about some ultra-precision lapping technologies in China and foreign are discussed, in the end the detection apparatus used in precision working are also introduced.
出处
《现代制造工程》
CSCD
2008年第3期126-128,共3页
Modern Manufacturing Engineering
基金
浙江省科技专项重点资助项目(2006C11069)
关键词
研磨
磨粒
超精密研磨
超精密测量
Lapping
Grains
Ultra-precision lapping
Ultra-precision detection