摘要
概述了金刚石薄膜与衬底附着力研究的最新进展,详细讨论了衬底材料的性质、衬底预处理方法、过渡层、负偏压以及CVD沉积条件对金刚石薄膜附着力的影响,总结出提高附着力的主要方法,并分析了金刚石薄膜的应用状况,指出了扩大金刚石薄膜应用的新方向及存在的主要问题。
In this paper, the latest researches of adhesion between substrates and diamond films are summarized.The influences of substrate properties, pretreatment of substrates, interlayer, bias and deposition parameters of diamond films on the adhesion between diamond films and substmtes are discussed in detail. The methods of how to improve the adhesion are summarized. In the end the current application state of diamond films is analyzed, and a new direction to expand the application of diamond films and the main existing problems are pointed out
出处
《材料导报》
EI
CAS
CSCD
北大核心
2008年第3期85-89,共5页
Materials Reports
基金
河南省科技攻关(0624250014)
郑州大学培育基金
关键词
金刚石薄膜
附着力
预处理过渡层
沉积条件
diamond films, adhesion, pretreatment, interlayer, deposition parameters
