光纤连接器端面研磨与抛光的运动分析

Analysis on Kinematics of Lapping and Polishing for Fiber Optical Connectors

目的为了获得光纤连接器端面研磨与化学机械抛光(CMP)过程中的运动状态对加工精度的影响规律.方法建立双驱动差动行星式抛光机的运动学方程,基于这个方程利用随机磨料点法对磨料切削轨迹和平均相对速度场等进行了计算机数值模拟,然后依据PRESTON方程讨论了在加工中运动参量对光纤连接器端面的平均速度分布的均匀性,以及对加工形状精度的影响.结果获得了磨料切削轨迹,平均相对速度分布等对形状精度的影响规律.结论增大系杆长度和齿环转速可以使轨迹与平均相对速度分布获得合理状态,而系杆的转速存在一个合理的参数区域.

In order to obtain the effects of the movement state to the profile precision of the fiber optic connector end surface in the process of lapping and polishing, a kinematics model of the lapping and polishing machine with planet movement is developed, and based on this model the average relative velocity distribution and the track of abrasive grains on the lapping and polishing are numerically simulated with the way of stochastic abrasive grains, then based on the Preston＇s equation, the uniformity of the average relative velocity distribution on the connector end surface and its effects on the end surface shape precision are discussed, and the results are that the average relative velocity distribution and the track of abrasive grains have rather better value when the tie bar length and the tooth link rotational speed are increased and the tie bar rotation speed that is chosen in a best parameter region can be obtained.