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Effects of heat treatment on morphological,optical and electrical properties of ITO films by sol-gel technique 被引量：2

Effects of heat treatment on morphological,optical and electrical properties of ITO films by sol-gel technique
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摘要 Indium-tin-oxide(ITO)films were prepared on the quarts glass by sol-gel technique.Effects of different heat treatment temperatures and cooling methods on the morphological,optical and electrical properties of ITO films were measured by TG/DTA, IR,XRD,SEM,UV-VIS spectrometer and four-probe apparatus.It is found that the crystallized ITO films exhibit a polycrystalline cubic bixbyite structure.The heat treatment process has significant effects on the morphological,optical and electrical properties of ITO films.Elevating the heat treatment temperature can perfect the crystallization process of ITO films,therefore the optical and electrical properties of ITO films are improved.But the further increasing of heat treatment temperature results in the increment of ITO films’resistivity.Compared with ITO films elaborated by furnace cooling,those prepared through air cooling have following characteristics as obviously decreased crystalline size,deeply declined porosity,more compact micro-morphology,improved electrical property and slightly decreased optical transmission. Indium-tin-oxide（ITO） films were prepared on the quarts glass by sol-gel technique. Effects of different heat treatment temperatures and cooling methods on the morphological, optical and electrical properties of ITO films were measured by TG/DTA, IR, XRD, SEM, UV-VIS spectrometer and four-probe apparatus. It is found that the crystallized ITO films exhibit a polycrystalline cubic bixbyite structure. The heat treatment process has significant effects on the morphological, optical and electrical properties of ITO films. Elevating the heat treatment temperature can perfect the crystallization process of ITO films, therefore the optical and electrical properties of ITO films are improved. But the further increasing of heat treatment temperature results in the increment of ITO films＇ resistivity. Compared with ITO films elaborated by furnace cooling, those prepared through air cooling have following characteristics as obviously decreased crystalline size, deeply declined porosity, more compact micro-morphology, improved electrical property and slightly decreased optical transmission.
作者 李芝华 柯于鹏 任冬燕
机构地区 School of Materials Science and Engineering
出处 《中国有色金属学会会刊：英文版》 EI CSCD 2008年第2期366-371,共6页 Transactions of Nonferrous Metals Society of China
基金 Project(50271084)supported by the National Natural Science Foundation of China
关键词 热处理技术 光学特性 电学特性 溶胶-凝胶技术 薄膜 ITO film sol-gel technique heat treatment electrical property optical property
分类号 TG156 [金属学及工艺—热处理]
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参考文献15

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中国有色金属学会会刊：英文版
2008年 第2期

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