微尘粒子对微机械陀螺仪的可靠性影响仿真

The Simulation of Impact of Particulate Contamination on the Reliability of Comb Gyroscope

借助Coventor Ware软件,建立在微机械陀螺仪中质量块与底部电极间附有微尘的模型。在网格化后得到的有限元模型基础上,进行模态分析,得到了微尘对驱动和检测模态谐振频率的影响仿真。在载荷承受分析里,微尘使得微机械陀螺仪的临界载荷和载荷承受范围缩小。

A solid model with a particulate contamination located between the plate mass and the electrode is constructed through the CoventorWare software. In the modal analysis, the impact of particulate contamination on the driving and detecting modal resonance frequencies of comb gyroscope is researched on the basis of FEM model got after the model is divided into lattices. In the load press analysis, the load press critical value is reduced due to particulate contamination.