摘要
介绍做通道板Al2O3防离子反馈膜的离子透过特性试验方法及结果。给出描述离子气馈膜运转有效性的理论表达式。
The method and results of an ion transmission characteristie experiment of Al2O3 barrier feedback film are introduced. Theoretical expression deseribing the effectiveness of ion feedback film operating is given.
出处
《应用光学》
CAS
CSCD
1997年第5期26-29,共4页
Journal of Applied Optics