摘要
详细介绍快速响应单晶硅空间光调制器件的结构、工作机理、制作工艺、性能参数。空间光调制器的极限分辨率为401p／mm，口径为40mm，在930mm（△λ＝40nm）写入光灵敏度为20μW／cm2，响应时间为15ms。给出该器件的应用实例。
The structure, operating principle, processing technology and performance parameters of single crystalline silicon spatial light modulator with fast response are presented in details. The limiting resolution of 401p/mm, aperture of 40mm, incident light sensitivity of 20 μw/cm2 at 9. 30nm (△λ=400nm ) and response time of 15ms of the spatial light modulator are reported. And the sample of this device is given.
出处
《应用光学》
CAS
CSCD
1997年第3期46-48,共3页
Journal of Applied Optics
关键词
空间光调制器
液晶光阀
单晶硅
spatial light modulator, liquid crystal light valve, single crystalline silicon,limiting resolution
