阴极真空弧离子源的研制

Development of Cathode Vacuum Arc Ion Source

为发展金属离子束材料表面改性技术的工业应用，北师大低能核物理所研制成阴极真空弧离子源和离子注入装置．简要介绍该设备的结构、原理和性能．

The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.