摘要
本文针对EACVD过程中经常出现的放电振荡和不稳定现象,比较系统地研究了EACVD中热阴极直流放电特性及其与工艺参数之间的关系,分析和讨论了放电振荡和不稳定现象发生的原因,并给出了避免和控制的途径和措施。
Recent experimental results of reversed field pinch (RFP) and ultra low safety factor q (ULQ) configurations have been achieved by means of pre ionization, air core transformer power crowbar, vacuum chamber discharge cleaning, carbonization and titanium gettering. The plasma property was so improved as to make the appearance of the plasma current flat top with increased value while impurities were controlled effectively and plasma temperature increased by carefully controlling wall condition. A stable confinement RFP configuration was obtained. Stable and relaxational ULQ discharges have been achieved during operations with different q values.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1997年第3期34-38,共5页
Nuclear Fusion and Plasma Physics
基金
国家自然科学基金
关键词
放电振荡
稳流电源
等离子体
CVD
热阴极
RFP experiment ULQ discharge Titanium gettering Wall carbonizaiton