检测质量对硅微机械框架振动陀螺影响的研究

STUDY ON THE IMPACT OF PROOF MASS ON SILICON MICROMECHANICAL GIMBAL VIBRATING GYROSCOPE

根据陀螺的动力学方程，从陀螺设计中的重要参数——内、外框架组件的等惯量约束条件和振动灵敏度等角度，探讨了检测质量对陀螺性能的影响，为微机械框架振动陀螺的设计提供了理论依据。

The impact proof mass on the gyros performance is discussed on the basis of microgyro dynamic equation and several important parameters in the design of micromechanical vibrating gyros, including equivalent moment of inertia constraint conditions in the inner and outer gimbals, sensitivity, etc . This study will lay foundation for the gyros design in the near future.