镁合金表面磁控溅射CrAlTiN镀层的制备技术研究

Study on Preparation Technique of CrAlTiN Coatings on Magnesium Alloy by Magnetron Sputtering

使用闭合场非平衡磁控溅射离子镀技术,通过改变偏压在镁合金表面制备了CrAlTiN镀层,对镀层厚度、硬度、结合力和耐磨性进行了检测,使用SEM和XRD分析了镀层的形貌和相组成,结果表明:通过改变偏压可以在镁合金表面沉积一层具有一定耐磨性能的CrAlTiN镀层;偏压对镁基CrAlTiN镀层的结合力和耐磨性影响很大,在偏压为35V时具有最好的结合力和耐磨性能,随着偏压的增大,镀层硬度提高,致密性增强,厚度降低;镁基CrAlTiN镀层为柱状晶组织,具有面心立方结构,点阵类型与面心立方CrN相同。

Using closed field unbalanced magnetron sputtering Ion plating, the CrAlTiN coatings were deposited on the magnesium alloy through changing bias. The thickness, hardness, adhesion and wear-resistance of coatings were tested, the morphologies and phase composition of coatings were investigated by SEM and XRD . The results showed that the CrAlTiN coatings can be deposited on the magnesium alloy by changing the bias. The hardness and compactness of coatings are improved with the increase of bias. The coatings have the best adhesion and wear-resistance while bias at 35V. The microstructure of CrAlTiN corresponds to that of fcc CrN.