摘要
We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.
We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional （3D） surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.
基金
the National Science Foundation of China (No.50745020).
关键词
仪表电路
表面形貌学
测量误差
大范围精密测量
位移传感器
instrument circuit, surface topography
measurement error, wide range precision instrument
displacement sensor
3D platform
