用纳秒激光在镜面不锈钢表面刻蚀微光栅结构

Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Nanosecond Laser

研究了利用波长为532 nm的激光二极管抽运全固态激光器(DPSSL),采用双光束干涉手段,在镜面不锈钢表面直接刻蚀形成微光栅结构(MGS)的方法。通过实验,分析了激光功率、光束口径、双光束干涉角与光栅槽深和占宽比之间的关系。利用光学显微镜和原子力显微镜(AFM)对实验结果的检测分析表明,在激光功率为45 mW,双光束干涉角为20°的条件下,得到光栅周期为1.34μm,槽深为300 nm的最佳微光栅结构。同时,在适当激光功率下,增加光栅周期,增加光束口径都能提高光栅槽深。

A method of etching micro grating structures （MGSs） on the surface of glazed stainless steel directly was investigated, and a 532 nm diode pumped solid-state laser （DPSSL） was used. The influences of the experimental parameters such as laser power, source beam diameter and period of grating, on the depth of grooves and duty cycle of MGSs were analyzed. The results were concluded and analyzed with conventional optical microscopy and atomic force microscopy （AFM）. When the laser power and cross angle are 45 mW and 20° respectively, the best MGSs are obtained with 1.34 μm in period and 300 nm depth. Meanwhile, either increasing the grating period or the source beam diameter can enhance the depth of grooves.