K9玻璃薄膜对离子交换磷酸盐玻璃波导表面保护的优化研究

Optimization of K9 Glass Film as Protection for Erbium-Doped Phosphate Glass Surface during Ion-Exchange Processing

采用镀K9玻璃薄膜方法来解决离子交换掺铒磷酸盐玻璃波导表面的侵蚀问题,对K9玻璃薄膜的厚度进行了优化研究。测量分析了样品的荧光光谱和荧光寿命,采用光学显微镜和棱镜耦合技术对不同K9玻璃薄膜厚度下制备波导的表面形貌和导光特性进行了表征和测试。结果表明,与掺铒磷酸盐玻璃原材料相比,镀K9玻璃薄膜后荧光光谱保持不变,荧光寿命稍有下降（约0.2 ms）;K9玻璃薄膜的厚度在60～80 nm的范围内保护效果最佳。为下一步制备掺铒有源玻璃光波导器件奠定了良好的实验基础。

K9 glass film was used as protection coating in order to avoid the surface corrosion of erbium-doped phosphate glass during ion-exchange processing for optical waveguide fabrication. The fluorescent spectrums and fluorescent lifetimes of erbium ions in samples were measured and analyzed. The fluorescent spectrums were not changed after being coated by K9 glass film with different thickness, while the fluorescent lifetimes were reduced by 0.2 ms compared with the raw erbium-doped phosphate glass. The surface morphology was observed by means of microscope and the optical characteristics of planar waveguide were measured with prism-coupling technique. The effect of thickness of K9 glass film on the waveguide fabrication was investigated and the optimal thickness was found to be 60-80 nm. It would provide a good experimental base for further fabrication of active glass optical waveguide devices.