新型接触式电容压力传感器

New Kind of Touch Mode Capacitive Pressure Sensor

与其他类型压敏器件相比,接触式电容压力传感器(TMCPS)有着明显的优点,例如较好的线性,高灵敏度和大过载保护能力等。为了达到更好的性能,设计了一种新型的接触式电容压力传感器(DTMCPS),这种新型的结构是在传统的TMCPS的底部电极上刻蚀了一个浅槽。与现有的接触式电容压力传感器相比,这种结构可以实现更好的线性和更大的线性范围。使用有限元分析软件对膜片的变形进行了分析并阐述了传感器的结构和工艺过程。分析结果表明这种新型结构的传感器可以在保持传统结构优点的同时实现更高的灵敏度,更好的线性和更大的线性范围。

Touch mode capacitive pressure sensor （TMCPS） has distinct advantages over other pressure sensors. To achieve better characteristics,a new type of touch mode capacitive pressure sensor named DTMCPS was devised, which had an additional thin notch on the bottom electrode of traditional TMCPS. Compared to present touch mode capacitive pressure sensors, the new sensor is characterized by better linearity and large linear operation range, Finite element analysis （FEA） was employed to model the structural deformation of this device. After that, the structure and fabrication process of the sensor were given.